kw.\*:("Plastic deformation magnetic assembly")
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Plastic deformation magnetic assembly of out-of-plane structures using vapour phase hydrofluoric (HF) acid releaseARGYRAKIS, P; CHEUNG, R.Microelectronic engineering. 2009, Vol 86, Num 11, pp 2176-2179, issn 0167-9317, 4 p.Article
